--- a/openide.util.lookup/src/org/openide/util/lookup/implspi/AbstractServiceProviderProcessor.java	
+++ a/openide.util.lookup/src/org/openide/util/lookup/implspi/AbstractServiceProviderProcessor.java	
@@ -50,6 +50,7 @@ 
 import java.io.OutputStreamWriter;
 import java.io.PrintWriter;
 import java.lang.annotation.Annotation;
+import java.nio.file.NoSuchFileException;
 import java.util.ArrayList;
 import java.util.HashMap;
 import java.util.List;
@@ -235,6 +236,8 @@ 
                     }
                 } catch (FileNotFoundException x) {
                     // OK, created for the first time
+                } catch (NoSuchFileException x) {
+                    // OK, created for the first time
                 }
             } catch (IOException x) {
                 processingEnv.getMessager().printMessage(Kind.ERROR, x.toString());